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Atomic-Level Precision Cluster Beam System

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Fine Chemicals Dept., Electronic Materials Div.

Product Information

English Name

Atomic-Level Precision Cluster Beam System

Product Features

Product Line

High-Resolution Mass Selection

Cluster deposition with atomic-number precision and a.m.u.-level mass-selection resolution in the ultra-small size range

High-Resolution Mass Selection Across the Full Size Range

Supports high-throughput, high-resolution cluster deposition and high-resolution mass selection across the entire size range

Multi-Element Mass Selection

Production of multi-element alloy clusters and control of atomic arrangement using a temperature-controlled gas-phase condensation system

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